Organizing committee

Conference Chairs:

Erwin Kessels, Eindhoven Univ. of Technology
Annelies Delabie, IMEC

Local Organizing Committee:

Matty Caymax, IMEC
Anne De Smet, Momentum
Sabien De Hanscutter, Momentum
Christoph Detavernier, Univ. Gent
Harm Knoops, Eindhoven Univ. of Technology
Fred Loosen, IMEC
Richard van de Sanden, Eindhoven Univ. of Technology
Johan Swerts, ASM
Kathy Verlinden, IMEC

Program Committee:

Marek Boleslawski, SAFC Hitech Kisik Choi, AMD Jeff Elam, Argonne National Lab Steve, George, Univ. of Colorado Roy Gordon, Harvard Univ. Suvi Haukka, ASM Chris Hodson, Oxford Instruments Hyung-Jun Kim, Postech Univ. Victor Ku, TSMC Greg Parsons, North Carolina State Univ. Riikka Puurunen, VTT Mikko Ritala, Univ. of Helsinki Uwe Schroeder, Qimonda Yoshi Senzaki, Aixtron Glen Wilk, ASM Peter Ye, Purdue Univ.

Chair ALD 2001 Chair ALD 2005 Chair ALD 2006 Chair ALD 2003 Chair ALD 2004 Chair ALD 2007

International Advisory Committee:

Yves Chabal, Rutgers Univ. Brendan McDougall, Applied Materials Hyeongtag Jeon, Hanyang Univ. Sang-In Lee, Vesta Technology Markku Leskela, Univ. of Helsinki Ana Londergan, Qualcomm Dae-Gyu Park, IBM Shi-woo Rhee, Postech Univ. Steve Rossnagel, IBM Tom Seidel, Aixtron Cheol-Seong Hwang, Seoul National Univ. Tetsuji Yasuda, AIST

Chair ALD 2007 Chair ALD 2002 Chair ALD 2006