Registration for the IMEC - Eindhoven visit is closed. The text below is left to provide information about the visit for those that have already registered for the visit.
After the ALD 2008 conference, on Thursday July 3, conference participants have the opportunity to visit IMEC (Leuven, Belgium) and the Eindhoven University of Technology (Eindhoven, The Netherlands).
IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. Its research focuses on the next generations of chips and systems, and on the enabling technologies for ambient intelligence. IMEC’s research bridges the gap between fundamental research at universities and technology development in industry. More information about IMEC can be found on www.imec.be.
The Eindhoven University of Technology (TU/e, www.tue.nl) is a research-driven university within the engineering science & technology domain with about 8000 students and 3000 employees. The Plasma and Materials Processing group (www.phys.tue.nl/pmp) is one of the largest groups within the Dept. of Applied Physics and it covers the field of plasma-based synthesis of thin films, nanostructures, and devices using methods such as (plasma-enhanced) CVD and ALD. The work of the group focuses on: (i) the development of thin film synthesis techniques, tools, and processes in collaboration with industry for applications in the field of microelectronics, solar cells, displays, protective and optical coatings, and microsystems; (ii) implementation and development of in situ and real time plasma, surface, and thin-film diagnostics for fundamental studies of thin film growth.
Two options are available:
1. Visit IMEC
Participants should meet at 8:30 at the parking of the Oud Sint Jan conference
center in Bruges. Upon arrival, please announce your presence to Ms. Laura Nyns
or Ms. Mihaela Popovici. At 8:45, the bus will leave to IMEC
(arrival around 10:30). In view of the tight time schedule, the bus
will not wait for missing people.
The IMEC visit will consist of a general introduction to IMEC, a presentation of the “Advanced Modules and Process Steps (AMPS)” department by Matty Caymax, and a guided tour around the IMEC campus. The IMEC campus has 24,400 m2 of office space, laboratories, training facilities, and technical support rooms. Two cleanrooms run a semi-industrial operation. The IMEC4 cleanroom, compatible with the latest 300mm wafer standards, supports the More Moore research on (sub-)32nm process technology. The IMEC1 cleanroom handles wafers with a diameter of up to 200mm and is used for the More than Moore research. The guided tour will include a look into the IMEC4 300mm cleanroom and technical support facilities.
A sandwich lunch will be provided.
After visiting IMEC (anticipated ending time is 14:00), there are 3 possibilities:
1. you can continue to join the visit to Eindhoven University (see below)
2. the bus can take you back to Bruges (arrival around 16:00)
3. the bus can drop you off at Leuven railway station (around 14:30). From Leuven
railway station, there are 3 trains per hour that take you directly to Brussels
airport (15 minute journey). The centre of Leuven is within walking distance
from Leuven railway station. No return trip to Bruges is included in this case.
2. Visit IMEC and Eindhoven University of Technology
At 14:00 the bus will leave from IMEC for Eindhoven with an estimated arrival
time of 15:45. After some refreshments an overview of the research at the TU/e
and particularly in the Plasma and Materials Processing group will be presented
by Prof. Richard van de Sanden. Afterwards a lab tour will take place which
also includes a visit of the 800 m2 cleanroom facilities of the TU/e. The equipment
demonstrated includes thermal and plasma-enhanced ALD tools (home-built as well
as the Oxford Instruments FlexAL and OpAL systems), plasma-enhanced CVD tools,
ultrahigh vacuum beam experiments, and atmospheric plasma equipment. Also several
in situ and real time gas phase, surface and thin film diagnostics will be demonstrated.
At around 18:30 drinks and food will be served.
Please note that in principle no return trip to Bruges is included. We suggest
that you either stay in Eindhoven for the night, travel to Amsterdam or Amsterdam
airport (Eindhoven – Amsterdam takes less than 90 min.), or travel otherwise.
Drop-off at the Eindhoven railway station will be arranged. For a limited number
of persons transport to hotels in the neighborhood of Brussels airport is also
available.
Luggage on bus: it is possible to carry your luggage on the bus to IMEC and to Eindhoven. Please notify us in case your luggage exceeds one piece of regular sized suitcase/bag and one piece of carry-on luggage. We cannot guarantee that you will be able to carry on oversized items on the bus.
The visits are free of charge, but registration is required. Please fill out the online registration form. As participation is limited, registrations will be considered on a first-come, first-served basis.
For more information, please contact: Ald2008@tue.nl